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Patent Searching and Data


Title:
POWER SUPPLY DEVICE FOR VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2012/121383
Kind Code:
A1
Abstract:
A power supply device for a vacuum pump, equipped with: cooling piping for circulating a cooling medium; a temperature sensor that detects the temperature of the cooling piping; a valve that adjusts the amount of cooling medium circulating in the cooling piping; and a valve control unit that controls the opening/closing of the valve so as to maintain the temperature detected by the temperature sensor at a prescribed temperature at which condensation does not occur.

Inventors:
MORIYAMA NOBUHIKO (JP)
SHIBA MAMORU (JP)
Application Number:
PCT/JP2012/056162
Publication Date:
September 13, 2012
Filing Date:
March 09, 2012
Export Citation:
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Assignee:
SHIMADZU CORP (JP)
MORIYAMA NOBUHIKO (JP)
SHIBA MAMORU (JP)
International Classes:
F04B37/16; F04B39/06; F04B49/06; F04D19/04
Foreign References:
JP2006274960A2006-10-12
JPH0577992U1993-10-22
JP2009174333A2009-08-06
Attorney, Agent or Firm:
NAGAI, Fuyuki (JP)
Fuyuki Nagai (JP)
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Claims: