Title:
POWER SUPPLY MEMBER AND SUBSTRATE TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2015/026004
Kind Code:
A1
Abstract:
The present invention relates to a power supply member and a substrate treatment apparatus, the power supply member comprising: a plate-shaped lower plate made of conductive material, the bottom side of which is electrically connected to a reaction apparatus; a plate-shaped intermittent power supply unit, which is provided with a conductive section in one part thereof comprising conductive material and a non-conductive section in another part thereof comprising non-conductive material, and the lower surface of which is in contact with the upper surface of the lower plate, for supplying power cyclically to the lower plate by rotating around a central shaft; a power supply line, one end of which is positioned on the upper surface of the intermittent power supply unit, for supplying RF power; and a driving unit, coupled with the intermittent power supply unit, for supplying rotational power thereto. The present invention allows the intermittent power supply unit to supply RF power to the reaction apparatus via rotation without using an on/off switch for the RF power, thereby allowing an accurate mechanical control of the power supply.
More Like This:
Inventors:
LEE SANG MYO (KR)
JUNG MIN YOUNG (KR)
JUNG MIN YOUNG (KR)
Application Number:
PCT/KR2013/008959
Publication Date:
February 26, 2015
Filing Date:
October 08, 2013
Export Citation:
Assignee:
ILHAHITEC (KR)
International Classes:
H01L21/205; H01L21/02
Foreign References:
| KR20090011410A | 2009-02-02 | |||
| KR20080027009A | 2008-03-26 | |||
| KR20000051006A | 2000-08-16 | |||
| KR20020028415A | 2002-04-17 |
Attorney, Agent or Firm:
NURY PATENT LAW FIRM (KR)
특허법인누리 (KR)
특허법인누리 (KR)
Download PDF: