Title:
PRCISION MACHINING STAGE EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2004/012260
Kind Code:
A1
Abstract:
Precision machining stage equipment, wherein a movable table for supporting a work is allowed to move in any direction in a same plane by a table holding mechanism, fed in the same plane by an electromagnetic drive means, and stopped at any position in the same plane by an electromagnetic braking mechanism, the electromagnetic drive means feeds the movable table by a magnetic interaction between driven magnets and drive coils, and the electromagnetic braking mechanism having braking magnets and non-magnetic and conductive braking plates produces a braking force based on the magnetic action of a magnetic force by an eddy current produced in the braking plates and a magnetic force of the braking magnets according to the movement of the movable table by the set of the braking magnets and the braking plates.
More Like This:
| WO/2002/045903 | MACHINE-TOOL IN PARTICULAR WITH PARALLEL ARCHITECTURE ACCOMMODATING DEFORMED ARTICULATIONS |
| JP10000519 | XY TABLE FOR FINE ADJUSTMENT |
| WO/2001/034990 | CLAMPING AND/OR BRAKING DEVICE |
Inventors:
Kano, Yoshio (2-14-7, Shiroyama-cho Takasaki-shi, Gunma, 370-0866, JP)
Onozaki, Junichi c/o TAMURA CORPORATION (1-19-43 Higashi-oizum, Nerima-ku Tokyo, 178-8511, JP)
Onozaki, Junichi c/o TAMURA CORPORATION (1-19-43 Higashi-oizum, Nerima-ku Tokyo, 178-8511, JP)
Application Number:
PCT/JP2003/009641
Publication Date:
February 05, 2004
Filing Date:
July 30, 2003
Export Citation:
Assignee:
TAMURA CORPORATION (1-19-43, Higashi-oizumi Nerima-ku, Tokyo, 178-8511, JP)
JAPAN SCIENCE AND TECHNOLOGY AGENCY (4-1-8, Honcho Kawaguchi-shi, Saitama, 332-0012, JP)
Kano, Yoshio (2-14-7, Shiroyama-cho Takasaki-shi, Gunma, 370-0866, JP)
Onozaki, Junichi c/o TAMURA CORPORATION (1-19-43 Higashi-oizum, Nerima-ku Tokyo, 178-8511, JP)
JAPAN SCIENCE AND TECHNOLOGY AGENCY (4-1-8, Honcho Kawaguchi-shi, Saitama, 332-0012, JP)
Kano, Yoshio (2-14-7, Shiroyama-cho Takasaki-shi, Gunma, 370-0866, JP)
Onozaki, Junichi c/o TAMURA CORPORATION (1-19-43 Higashi-oizum, Nerima-ku Tokyo, 178-8511, JP)
International Classes:
B23Q1/34; B23Q1/62; B23Q5/28; H02K41/03; (IPC1-7): H01L21/68; H02K41/03; G12B5/00; B23Q1/44; B23Q5/28
Attorney, Agent or Firm:
Takahashi, Isamu (7th Floor, Shinoda Bldg. 10-7, Higashi Kanda 1-chom, Chiyoda-ku Tokyo, 101-0031, JP)
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