Title:
PRE-ALIGNMENT APPARATUS AND PRE-ALIGNMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2011/065380
Kind Code:
A1
Abstract:
Disclosed is a pre-alignment apparatus, with which the size of the whole exposure unit can be reduced, and a tact time can be shortened. Also disclosed is a pre-alignment method.
The pre-alignment apparatus (20) has a substrate temperature control mechanism, which controls the temperature of a substrate (W) placed on a precision temperature control plate (22), and a foreign material detecting mechanism (34), which detects foreign materials on the substrate placed on the precision temperature control plate (22). Thus, the pre-alignment apparatus (20), the substrate temperature control mechanism and the foreign material detecting mechanism are integrated into a single apparatus, the number of transfer robots is reduced, and the size of the whole exposure unit is reduced. Furthermore, the tact time is shortened by performing the pre-alignment and the foreign material detection to the substrate having the temperature thereof being controlled.
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Inventors:
HASHINAGA HIROSHI
Application Number:
PCT/JP2010/070933
Publication Date:
June 03, 2011
Filing Date:
November 24, 2010
Export Citation:
Assignee:
NSK LTD (JP)
HASHINAGA HIROSHI
HASHINAGA HIROSHI
International Classes:
G03F9/00; G03F7/20; H01L21/027; H01L21/683
Foreign References:
| JP2009049060A | 2009-03-05 | |||
| JP2005311113A | 2005-11-04 | |||
| JP2005116627A | 2005-04-28 | |||
| JP2003197699A | 2003-07-11 | |||
| JP2008153572A | 2008-07-03 |
Attorney, Agent or Firm:
OGURI Shohei et al. (JP)
Shohei Oguri (JP)
Shohei Oguri (JP)
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