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Title:
PRE-TREATMENT APPARATUS AND METHOD FOR IMPROVING ADHESION OF THIN FILM
Document Type and Number:
WIPO Patent Application WO/2012/005539
Kind Code:
A2
Abstract:
Provided are a pre-treatment apparatus and method for improving an adhesion of a thin film. The pre-treatment apparatus includes: a gas compressor that compresses gas supplied from the outside and contained, and supplies a process gas that is compressed; a powder feeder for supplying a coating powder including a single metal or alloy supplied from the outside and contained; and a spray nozzle through which the process gas supplied from the gas compressor and the coating powder supplied from the powder feeder are cold sprayed on a surface of a base metal on which a thin film is to be deposited so as to form a porous metal coating layer on the surface of the base metal. The pre-treatment method includes: preparing a base metal including a single metal or alloy; preparing a coating powder including powder of one or more single metals or an alloy thereof; forming a porous metal coating layer on a surface of the base metal, on which a thin film is to be deposited, by cold-spraying the coating powder and a process gas to the surface of the base metal; and depositing the thin film on the coating layer, wherein the thin film includes metal.

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Inventors:
KO, Kyung Hyun (3 Hanshin Apt, Jamwon-dong Seocho-gu, Seoul 137-030, 34-1004, KR)
LEE, Hyuk Jun (204-701, Byucksan Apt. Jukjeon-dong, Suji-gu, Yongin-si, Gyeonggi-do 448-160, KR)
Application Number:
KR2011/005004
Publication Date:
January 12, 2012
Filing Date:
July 08, 2011
Export Citation:
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Assignee:
AJOU UNIVERSITY INDUSTRY COOPERATION FOUNDATION (San 5, Woncheon-dong Yeongtong-gu,,Suwon-si, Gyeonggi-do 443-749, KR)
KO, Kyung Hyun (3 Hanshin Apt, Jamwon-dong Seocho-gu, Seoul 137-030, 34-1004, KR)
LEE, Hyuk Jun (204-701, Byucksan Apt. Jukjeon-dong, Suji-gu, Yongin-si, Gyeonggi-do 448-160, KR)
International Classes:
C23C24/04; B05B7/14; C23C14/02
Attorney, Agent or Firm:
YOON, Jae Seung (7 Floor, Deokcheon Bldg.718-10 Yeoksam-dong, Gangnam-gu, Seoul 135-080, KR)
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Claims:



 
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