PRECURSOR FOR ACID-DISSOCIABLE DISSOLUTION-INHIBITIVE GROUP AND CYCLIC COMPOUND HAVING ACID-DISSOCIABLE DISSOLUTION-INHIBITIVE GROUP

WIPO Patent Application WO/2010/067627

A1

A compound represented by R-X, wherein R is a group represented by formula (1) and X is a halogen atom, hydroxy, an aryloxy, or a (meth)acrylic ester group represented by formula (5).

SHIBATA, Mitsuru (1280, Kamiizumi Sodegaura-sh, Chiba 93, 〒2990293, JP)
柴田充 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 〒2990293, JP)
KASHIWAMURA, Takashi (1280, Kamiizumi Sodegaura-sh, Chiba 93, 〒2990293, JP)
柏村孝 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 〒2990293, JP)
YOMOGITA, Akinori (1280, Kamiizumi Sodegaura-sh, Chiba 93, 〒2990293, JP)
蓬田知行 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 〒2990293, JP)
ISHII, Hirotoshi (1280, Kamiizumi Sodegaura-sh, Chiba 93, 〒2990293, JP)

JP2009/006825

June 17, 2010

December 11, 2009

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IDEMITSU KOSAN CO.,LTD. (1-1 Marunouchi 3-chome, Chiyoda-ku Tokyo, 21, 〒1008321, JP)
出光興産株式会社 (〒21 東京都千代田区丸の内三丁目１番１号 Tokyo, 〒1008321, JP)
SHIBATA, Mitsuru (1280, Kamiizumi Sodegaura-sh, Chiba 93, 〒2990293, JP)
柴田充 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 〒2990293, JP)
KASHIWAMURA, Takashi (1280, Kamiizumi Sodegaura-sh, Chiba 93, 〒2990293, JP)
柏村孝 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 〒2990293, JP)
YOMOGITA, Akinori (1280, Kamiizumi Sodegaura-sh, Chiba 93, 〒2990293, JP)
蓬田知行 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 〒2990293, JP)

C07C59/125; C07C65/17; C07C65/26; C07C69/63; C07C69/712; C07C69/76; C07C69/94; C07D311/22; C07D317/54; G03F7/039; H01L21/027

WATANABE, Kihei et al. (Shibashin Kanda Bldg. 3rd Floor, 26 Kanda Suda-cho 1-chome, Chiyoda-k, Tokyo 41, 〒1010041, JP)

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