Title:
PRECURSOR COMPOUND FOR FORMING METAL FILM AND METAL FILM USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/219428
Kind Code:
A1
Abstract:
The present invention relates to a precursor compound, containing molybdenum, for forming a metal film and a metal film using same, wherein the precursor compound has excellent reactivity with a substrate or a reactive gas and high volatility and can form a metal thin film with a low content of impurities in a wide temperature range, especially, even at a low temperature.
Inventors:
YUN HA KYUNG (KR)
YEO SO JEONG (KR)
LEE JAE WOO (KR)
KIM JUN YOUNG (KR)
SIM JANG KEUN (KR)
LEE HAN JIN (KR)
KIM PIL SOO (KR)
KIM JAE-HYUN (KR)
BOK CHEOL KYU (KR)
YEO SO JEONG (KR)
LEE JAE WOO (KR)
KIM JUN YOUNG (KR)
SIM JANG KEUN (KR)
LEE HAN JIN (KR)
KIM PIL SOO (KR)
KIM JAE-HYUN (KR)
BOK CHEOL KYU (KR)
Application Number:
PCT/KR2023/006373
Publication Date:
November 16, 2023
Filing Date:
May 10, 2023
Export Citation:
Assignee:
DONGJIN SEMICHEM CO LTD (KR)
International Classes:
C23C16/455; C07F11/00; C23C16/18; C23C16/34
Domestic Patent References:
| WO2001066816A1 | 2001-09-13 |
Other References:
BRATERMAN PAUL S, MILNE DAVID W, RANDALL EDWARD W, ROSENBERG EDWARD, THESIS, GLASGOW, BRATERMAN ; P S, WALKER A P, BEACH N A, GRAY: "Carbon4 3 Nuclear Magnetic Resonance Spectra of Tungsten and Molybdenum Carbonyl Derivatives", JOURNAL OF THE CHEMICAL SOCIETY, DALTON TRANSACTIONS., vol. 10, 1 January 1973 (1973-01-01), pages 1027 - 1031, XP093107732, DOI: 10.1039/DT9730001027
MASTERS ANTHONY F, BOSSARD GERALD E, GEORGE ADRIAN, BROWNLEE ROBERT T C, O'CONNOR MAXWELL J, WEDD ANTHONY G.: " Applications of molybdenum-95 NMR. 8. Molybdenum(0) carbonyl derivatives of phosphines, phosphites and related ligands. ", INORGANIC CHEMISTRY, vol. 22, no. 6, 1 March 1983 (1983-03-01), pages 908 - 911, XP093107730, DOI: 10.1021/ic00148a014
ALYEA ELMER C, SONG SHUQUAN: "95Mo NMR Spectroscopic Evidence for the Weak ^-Acceptor Ability of PCI3", INORGANIC CHEMISTRY, vol. 34, no. 15, 1 July 1995 (1995-07-01), pages 3864 - 3873, XP093107729, DOI: 10.1021/ic00119a006
WATSON, I.M. ; CONNOR, J.A. ; WHYMAN, R.: "Non-crystalline chromium, molybdenum and tungsten phosphate films prepared by metal organic chemical vapour deposition", THIN SOLID FILMS, ELSEVIER, AMSTERDAM, NL, vol. 201, no. 2, 30 June 1991 (1991-06-30), AMSTERDAM, NL , pages 337 - 349, XP025775584, ISSN: 0040-6090, DOI: 10.1016/0040-6090(91)90122-E
MASTERS ANTHONY F, BOSSARD GERALD E, GEORGE ADRIAN, BROWNLEE ROBERT T C, O'CONNOR MAXWELL J, WEDD ANTHONY G.: " Applications of molybdenum-95 NMR. 8. Molybdenum(0) carbonyl derivatives of phosphines, phosphites and related ligands. ", INORGANIC CHEMISTRY, vol. 22, no. 6, 1 March 1983 (1983-03-01), pages 908 - 911, XP093107730, DOI: 10.1021/ic00148a014
ALYEA ELMER C, SONG SHUQUAN: "95Mo NMR Spectroscopic Evidence for the Weak ^-Acceptor Ability of PCI3", INORGANIC CHEMISTRY, vol. 34, no. 15, 1 July 1995 (1995-07-01), pages 3864 - 3873, XP093107729, DOI: 10.1021/ic00119a006
WATSON, I.M. ; CONNOR, J.A. ; WHYMAN, R.: "Non-crystalline chromium, molybdenum and tungsten phosphate films prepared by metal organic chemical vapour deposition", THIN SOLID FILMS, ELSEVIER, AMSTERDAM, NL, vol. 201, no. 2, 30 June 1991 (1991-06-30), AMSTERDAM, NL , pages 337 - 349, XP025775584, ISSN: 0040-6090, DOI: 10.1016/0040-6090(91)90122-E
Attorney, Agent or Firm:
YOU ME PATENT AND LAW FIRM (KR)
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