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Title:
PRECURSOR FOR FORMATION OF EUROPIUM-CONTAINING THIN FILM, AND METHOD FOR FORMING EUROPIUM-CONTAINING THIN FILM
Document Type and Number:
WIPO Patent Application WO/2012/132669
Kind Code:
A1
Abstract:
Provided are: a novel europium compound which has a melting point of 180˚C or less and can be stably supplied by bubbling in a chemical vapor deposition method and in an atomic layer deposition method; a precursor for the formation of a europium-containing thin film, which is composed of the novel europium compound; and a method for forming a europium-containing thin film using the precursor. A europium-containing thin film is formed using bis(tetramethyl monoalkyl cyclopentadienyl)europium as a precursor for the formation of a europium-containing thin film by a chemical vapor deposition method or by an atomic layer deposition method.

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Inventors:
MOGI TAKAYUKI (JP)
KUBOSHIMA YOSHINORI (JP)
HIGASHI SHINTARO (JP)
KIKUKAWA KAORU (JP)
Application Number:
PCT/JP2012/054388
Publication Date:
October 04, 2012
Filing Date:
February 23, 2012
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Assignee:
KABUSHIKIKAISHA KOJUNDOKAGAKU KENKYUSHO (JP)
MOGI TAKAYUKI (JP)
KUBOSHIMA YOSHINORI (JP)
HIGASHI SHINTARO (JP)
KIKUKAWA KAORU (JP)
International Classes:
C07F5/00; C23C16/40; H01L21/316; H01L21/318
Foreign References:
US20070235821A12007-10-11
US20070235822A12007-10-11
JP2009030162A2009-02-12
Attorney, Agent or Firm:
KINOSHITA SHIGERU (JP)
Shigeru Kinoshita (JP)
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