Title:
PREPARATION AND ENCAPSULATION PROCESS FOR HIGH-STOPBAND REJECTION LOW-PASS FILTER FOR 5G COMMUNICATIONS
Document Type and Number:
WIPO Patent Application WO/2022/241815
Kind Code:
A1
Abstract:
Disclosed in the present invention is a preparation and encapsulation process for a high-stopband rejection low-pass filter for 5G communications. A high-stopband rejection low-pass filter comprises a dielectric substrate layer, which comprises a gallium arsenide substrate layer and a SiNx substrate layer, which are arranged from bottom to top, wherein the gallium arsenide substrate layer is a base; a metal conductor layer, which comprises a metal ground layer, which is arranged on a lower surface of the gallium arsenide substrate layer; a filtering structure layer, which is used for realizing a filtering function, is located on the gallium arsenide substrate layer by means of photoetching, metal deposition, dry etching and high-temperature oxidation etching, and comprises upper and lower surfaces which are respectively located on of the SiNx substrate layer; and a passivation layer, which is used for covering the filtering structure layer. By means of the present invention, a photoresist is used as a material that ultimately forms a passivation layer, and in this way, the costs can be reduced and the yield is improved; when a metal conductor layer is manufactured, electron beam evaporation technology is used, such that the problem caused by electroplating can be effectively solved; and the present invention has a small in-band differential loss, three out-band transmission zero points, and good high-frequency rejection.
Inventors:
YUAN YE (CN)
ZHANG GUOZHU (CN)
ZHANG QIAOXING (CN)
ZHANG GUOZHU (CN)
ZHANG QIAOXING (CN)
Application Number:
PCT/CN2021/096739
Publication Date:
November 24, 2022
Filing Date:
May 28, 2021
Export Citation:
Assignee:
WUXI HAOBANG HI TECH CO LTD (CN)
International Classes:
H03H7/52
Foreign References:
| CN211125947U | 2020-07-28 | |||
| CN109951207A | 2019-06-28 | |||
| CN108988876A | 2018-12-11 | |||
| US20170134201A1 | 2017-05-11 |
Attorney, Agent or Firm:
JIANGYIN QING ZHOU PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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