Title:
PREPARATION METHOD FOR MASK PLATE AND MASK PLATE
Document Type and Number:
WIPO Patent Application WO/2016/165247
Kind Code:
A1
Abstract:
A preparation method for a mask plate and a mask plate. The mask plate has a shading function during an exposure period of a product. The method comprises: preparing a composite film layer (800), the composite film layer (800) comprising a first protective layer (804), an adhesion layer (802), a shielding layer (803) and a second protective layer (805), which are stacked in sequence; cutting only the first protective layer (804), the adhesion layer (802) and the shielding layer (803) in the composite film layer, a cutting path being corresponding to the shape of a region to be exposed on a product; removing cut parts, in shapes corresponding to the shape of the region to be exposed, from the first protective layer (804), the adhesion layer (802) and the shielding layer (803) in the composite film layer (800); and attaching the formed composite film layer (800) to a blank mask substrate (801), and removing the second protective layer (805) so as to form a mask plate.
Inventors:
ZHANG XIAOLEI (CN)
FUJINO SEIJI (CN)
WANG XIAOHU (CN)
FUJINO SEIJI (CN)
WANG XIAOHU (CN)
Application Number:
PCT/CN2015/086655
Publication Date:
October 20, 2016
Filing Date:
August 11, 2015
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
G03C5/00; G03F1/00; G03F7/00
Foreign References:
| US20020142234A1 | 2002-10-03 | |||
| CN102138104A | 2011-07-27 | |||
| CN104407496A | 2015-03-11 | |||
| CN201556025U | 2010-08-18 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
中科专利商标代理有限责任公司 (CN)
中科专利商标代理有限责任公司 (CN)
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