Title:
PREPARATION METHOD FOR QUANTUM DEVICE, AND SUPERCONDUCTING CIRCUIT AND QUANTUM CHIP
Document Type and Number:
WIPO Patent Application WO/2024/067526
Kind Code:
A1
Abstract:
Disclosed in the present invention are a preparation method for a quantum device, and a superconducting circuit and a quantum chip. The method comprises: sequentially obtaining a plurality of superconducting material layers in different regions of a substrate, wherein the plurality of superconducting material layers each comprise a superconducting material deposited on the substrate and a hard mask covering the corresponding superconducting material, and the superconducting materials in the plurality of superconducting material layers comprise a superconducting material having dynamic inductance; performing etching to remove the hard masks on the plurality of superconducting material layers, so as to obtain a plurality of target circuit elements integrated onto the substrate; and preparing a target quantum device on the basis of the plurality of target circuit elements. The present invention solves the technical problem of it being difficult to prepare a superconducting quantum device.
Inventors:
GAO RAN (CN)
DENG CHUNQING (CN)
DENG CHUNQING (CN)
Application Number:
PCT/CN2023/121264
Publication Date:
April 04, 2024
Filing Date:
September 25, 2023
Export Citation:
Assignee:
ALIBABA DAMO HANGZHOU TECH CO LTD (CN)
International Classes:
H10N60/01
Foreign References:
| CN107871812A | 2018-04-03 | |||
| CN115568276A | 2023-01-03 |
Attorney, Agent or Firm:
BEIJING TONGJUN LAW FIRM (CN)
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