Title:
PREPARING AND OPERATING A VAPORIZER BODY FOR A PVD METALLIZATION INSTALLATION
Document Type and Number:
WIPO Patent Application WO2006029615
Kind Code:
A3
Abstract:
The invention relates to the preparation and operation of a vaporizer body in a PVD metallization installation for continuously supplying and vaporizing metal. A layer structure applied to the vaporizer body is, together with sinterable powder material in the unsintered state, fed to the metal, is applied in the form of a crude layer structure to the vaporizer body and is sinter-fused thereto in the metallization cycle by heating the vaporizer body. The layer structure can be used during the metallization process and can be renewed directly in the metallization installation after each metallization cycle.
Inventors:
NUERNBERGER MICHAEL (DE)
MAIZINGER RUDOLF (DE)
GOETZ ULRICH (DE)
MAIZINGER RUDOLF (DE)
GOETZ ULRICH (DE)
Application Number:
PCT/DE2005/001631
Publication Date:
June 22, 2006
Filing Date:
September 16, 2005
Export Citation:
Assignee:
SINTEC KERAMIK GMBH & CO KG (DE)
NUERNBERGER MICHAEL (DE)
MAIZINGER RUDOLF (DE)
GOETZ ULRICH (DE)
NUERNBERGER MICHAEL (DE)
MAIZINGER RUDOLF (DE)
GOETZ ULRICH (DE)
International Classes:
C23C14/24
Foreign References:
| EP0337391A2 | 1989-10-18 | |||
| US3216710A | 1965-11-09 | |||
| GB1263088A | 1972-02-09 | |||
| DE2535569A1 | 1976-02-26 | |||
| US4528120A | 1985-07-09 |
Download PDF: