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Patent Searching and Data


Title:
PRESSING MEMBER AND SUBSTRATE HOLDING TOOL
Document Type and Number:
WIPO Patent Application WO/2019/124443
Kind Code:
A1
Abstract:
A pressing member according to the present disclosure has an abutment surface abutting against an object substrate and is provided with: a deformation part that is elastic in a first direction; and two fixed parts that are connected to the deformation part. The deformation part has a plurality of first regions along the first direction, and a plurality of second regions along a second direction. The deformation part is bent at positions where the first regions and the second regions respectively intersect each other. The total length L1, in the first direction, of the deformation part is larger by 3 times or more than the height of the deformation part, the total length L2, in the second direction, of the deformation part is larger by 1.5 times or more than the width of the deformation part, and L2 is larger by 1-3 times than L1.

Inventors:
INOUE TETSUYA (JP)
YOSHIDA MASAO (JP)
TANAKA TAKUYA (JP)
Application Number:
PCT/JP2018/046803
Publication Date:
June 27, 2019
Filing Date:
December 19, 2018
Export Citation:
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Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; F16F1/22; F16F1/36
Foreign References:
JP2011097043A2011-05-12
JP2011216538A2011-10-27
JP2017089714A2017-05-25
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