Title:
PRESSING-TYPE PLASTIC DEFORMATION MULTI-PATTERNING METHOD, AND ENERGY-HARVESTER ELEMENT AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2019/039712
Kind Code:
A1
Abstract:
Provided is a pressing-type plastic deformation patterning method. The pressing-type plastic deformation patterning method may comprise the steps of: preparing a target substrate; preparing a first master substrate including a first master pattern and having hardness equal to or higher than that of the target substrate; bringing the target substrate into contact with the first master substrate and applying pressure to the target substrate and the first master substrate, thereby forming a first target pattern having a reverse image of the first master pattern on the target substrate; and separating the target substrate and the first master substrate from each other.
Inventors:
PARK WOON IK (KR)
CHOI YOUNG JOONG (KR)
CHOI YOUNG JOONG (KR)
Application Number:
PCT/KR2018/006620
Publication Date:
February 28, 2019
Filing Date:
June 12, 2018
Export Citation:
Assignee:
KOREA INST CERAMIC ENG & TECH (KR)
International Classes:
H02N1/04; B29C59/02; G03F7/00; G03F7/20
Foreign References:
| JP2004209971A | 2004-07-29 | |||
| JP2013086294A | 2013-05-13 | |||
| KR20060128886A | 2006-12-14 | |||
| JP2003515887A | 2003-05-07 | |||
| KR101476742B1 | 2014-12-29 |
Other References:
XIAO-SHENG ZHANG: "Frequency-Multiplication High-Output Triboelectric Nanogenerator for Sustainably Powering Biomedical Microsystems", NANO LETT., vol. 13, no. 3, 5 February 2013 (2013-02-05), pages 1168 - 1172, XP055578622
Attorney, Agent or Firm:
PARK, Sangyoul (KR)
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