Title:
PRESSURE-BASED GAS FLOW CONTROLLER WITH DYNAMIC SELF-CALIBRATION
Document Type and Number:
WIPO Patent Application WO/2014/152755
Kind Code:
A3
Abstract:
A method of measuring a molecular rate of gas flow from an upstream source of gas at a pressure higher than a pressure of a destination includes flowing the gas through an upstream valve into a cavity of known volume, then through a restrictor element before proceeding to the destination, controlling the upstream valve to vary a flow rate of the gas through the upstream valve in a determined manner such that its average pressure in the cavity correlates with an average level of gas flow and such that variations in pressure in the cavity induced by varying the flow rate of gas through the upstream valve in the determined manner induce instantaneous pressure variations smaller than 30% of the average pressure in that cavity.
Inventors:
HORWITZ CHRISTOPHER MAX (US)
Application Number:
PCT/US2014/027698
Publication Date:
December 31, 2014
Filing Date:
March 14, 2014
Export Citation:
Assignee:
HORWITZ CHRISTOPHER MAX (US)
International Classes:
G01F1/00; E03B1/00
Domestic Patent References:
| WO2000073868A1 | 2000-12-07 |
Foreign References:
| US20030000578A1 | 2003-01-02 | |||
| US20090143998A1 | 2009-06-04 | |||
| US20080300802A1 | 2008-12-04 | |||
| US20020198668A1 | 2002-12-26 | |||
| US20110220213A1 | 2011-09-15 |
Other References:
See also references of EP 3036510A4
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