Title:
PRESSURE DETECTION DEVICE AND PRODUCTION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2018/221400
Kind Code:
A1
Abstract:
Provided is a pressure detection device capable of suppressing a load on a ceramic substrate. A pressure detection device (10) has: a ceramic substrate (20); and a pressure sensor (30) that is electrically connected to the substrate (20) and detects fluid pressure. A surface of the substrate (20) facing an attach-to body (11) is covered with a first cover member (50). The first cover member (50) includes a first introduction part (54) made for introducing a fluid; and a first fixing part (52) for fixing to the attach-to body (11).
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Inventors:
SATO SHUJI
KOIDE SHIGEKI
KOIDE SHIGEKI
Application Number:
PCT/JP2018/020137
Publication Date:
December 06, 2018
Filing Date:
May 25, 2018
Export Citation:
Assignee:
NIPPON SEIKI CO LTD (JP)
International Classes:
G01L19/00; G01L9/00; H01L29/84
Foreign References:
JP2007139517A | 2007-06-07 | |||
JP2012073233A | 2012-04-12 | |||
JP2010217170A | 2010-09-30 | |||
US20160313201A1 | 2016-10-27 |
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