Title:
PRESSURE DETECTOR MOUNTING STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2001/011329
Kind Code:
A1
Abstract:
A pressure detector mounting structure capable of preventing a diaphragm from being deformed by a stress acting on a diaphragm type pressure detector and output characteristics and temperature characteristics from being varied when the pressure detector is incorporated in a fixture provided in a piping or equipment, wherein the pressure detector formed by fixedly combining a diaphragm base having a diaphragm with a sensor base incorporating a sensor element operating according to the displacement of the diaphragm is inserted into an inserting hole through a gasket and pressed air-tight fixedly from the upper side using a pressing member, the pressing member and the gasket are brought into contact with the upper and lower surfaces of a main body of the diaphragm base, respectively, and a shallow groove is formed in ring-shape in the lower surface of the main body on the inner side of a part in contact with the gasket so as to off set a deformation produced by a pressing force from the pressing member through the shallow groove.
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Inventors:
Ohmi, Tadahiro (1-17-301, Komegahukuro 2-chome Aoba-ku Sendai-shi, Miyagi, 980-0813, JP)
Hirose, Takashi (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Ideta, Eiji (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Ikeda, Nobukazu (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Dohi, Ryousuke (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Nishino, Kouji (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Yoshikawa, Kazuhiro (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Kagatsume, Satoshi (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Hirose, Jun (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Fukasawa, Kazuo (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Koizumi, Hiroshi (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Nagaoka, Hideki (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Hirose, Takashi (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Ideta, Eiji (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Ikeda, Nobukazu (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Dohi, Ryousuke (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Nishino, Kouji (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Yoshikawa, Kazuhiro (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Kagatsume, Satoshi (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Hirose, Jun (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Fukasawa, Kazuo (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Koizumi, Hiroshi (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Nagaoka, Hideki (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Application Number:
PCT/JP2000/005235
Publication Date:
February 15, 2001
Filing Date:
August 03, 2000
Export Citation:
Assignee:
FUJIKIN INCORPORATED (3-2 Itachibori 2-chome, Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
TOKYO ELECTRON LTD. (3-6 Akasaka 5-chome Minato-ku, Tokyo, Tokyo, 107-0052, JP)
Ohmi, Tadahiro (1-17-301, Komegahukuro 2-chome Aoba-ku Sendai-shi, Miyagi, 980-0813, JP)
Hirose, Takashi (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Ideta, Eiji (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Ikeda, Nobukazu (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Dohi, Ryousuke (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Nishino, Kouji (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Yoshikawa, Kazuhiro (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Kagatsume, Satoshi (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Hirose, Jun (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Fukasawa, Kazuo (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Koizumi, Hiroshi (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Nagaoka, Hideki (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
TOKYO ELECTRON LTD. (3-6 Akasaka 5-chome Minato-ku, Tokyo, Tokyo, 107-0052, JP)
Ohmi, Tadahiro (1-17-301, Komegahukuro 2-chome Aoba-ku Sendai-shi, Miyagi, 980-0813, JP)
Hirose, Takashi (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Ideta, Eiji (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Ikeda, Nobukazu (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Dohi, Ryousuke (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Nishino, Kouji (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Yoshikawa, Kazuhiro (Fujikin Incorporated 3-2, Itachibori 2-chome Nishi-ku Osaka-shi, Osaka, 550-0012, JP)
Kagatsume, Satoshi (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Hirose, Jun (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Fukasawa, Kazuo (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Koizumi, Hiroshi (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
Nagaoka, Hideki (Tokyo Electron Yamanashi Ltd. 650, Mitsuzawa Hosakacho Nirasaki-shi, Yamanashi, 407-0174, JP)
International Classes:
G01L9/04; G01L9/00; G01L19/00; G01L19/04; G01L19/06; G01L19/14; (IPC1-7): G01L19/00; G01L7/08
Attorney, Agent or Firm:
Sugimoto, Takeo (Kitahama-Katano Bldg. 1-21, Kitahama 2-chome Chuo-ku Osaka-shi, Osaka, 541-0041, JP)
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