Title:
PRESSURE LOADING FILM
Document Type and Number:
WIPO Patent Application WO/2018/050068
Kind Code:
A1
Abstract:
Disclosed is a pressure loading film (100). The pressure loading film (100) comprises: a film body (10), the film body (10) comprising a plurality of mutually isolated sub-cavities (30), the sub-cavities (30) being used for injecting a pressure medium so as to be adapted to load pressure onto a sample by means of a pressure loading surface (16) of the film body (10); and a supporting framework (20), the supporting framework (20) being arranged in the film body (10), and an elastic coefficient of the supporting framework (20) being greater than that of the film body (10). The pressure loading film (100) can realize independent pressure loading for each of the sub-cavities (30), so that the pressure in each area of the pressure loading surface (16) is loaded stably and pressure coupling is not easily caused.
Inventors:
CHEN XIANGYU (CN)
ZHAO DEWEN (CN)
WANG TONGQING (CN)
LI KUN (CN)
LU XINCHUN (CN)
ZHAO DEWEN (CN)
WANG TONGQING (CN)
LI KUN (CN)
LU XINCHUN (CN)
Application Number:
PCT/CN2017/101582
Publication Date:
March 22, 2018
Filing Date:
September 13, 2017
Export Citation:
Assignee:
UNIV TSINGHUA (CN)
HWATSING TECH CO LTD (CN)
HWATSING TECH CO LTD (CN)
International Classes:
B24B37/04; B24B21/04; B24B37/30; H01L21/302; H01L21/304
Domestic Patent References:
| WO2010068813A2 | 2010-06-17 |
Foreign References:
| TW201341187A | 2013-10-16 | |||
| CN1943989A | 2007-04-11 | |||
| US5938884A | 1999-08-17 |
Attorney, Agent or Firm:
TSINGYIHUA INTELLECTUAL PROPERTY LLC (CN)
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