Title:
PRESSURE MEASUREMENT SYSTEM AND PRESSURE MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2022/116553
Kind Code:
A1
Abstract:
A pressure measurement system and a pressure measurement method. The pressure measurement system comprises: a grinding arm (21) and a stress device (23), wherein the stress device (23) is unilaterally fixed, and the stress device (23) is used for bearing pressure of the grinding arm (21); a pressure sensor (22), which is fixed on the stress device (23) and used for measuring pressure borne by the stress device (23); and a grinding disk (20), which is fixed on the grinding arm (21), wherein the grinding arm (21) applies pressure to the stress device (23) by means of the grinding disk (20).
Inventors:
ZHANG ZHENGXIAN (CN)
PEI WEI (CN)
PEI WEI (CN)
Application Number:
PCT/CN2021/107263
Publication Date:
June 09, 2022
Filing Date:
July 20, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B24B49/00; B24B37/34; H01L21/67
Foreign References:
| CN102802871A | 2012-11-28 | |||
| CN102729136A | 2012-10-17 | |||
| CN211728760U | 2020-10-23 | |||
| CN110024087A | 2019-07-16 | |||
| CN109202686A | 2019-01-15 | |||
| CN205271690U | 2016-06-01 | |||
| CN207696339U | 2018-08-07 | |||
| JPH0938856A | 1997-02-10 |
Attorney, Agent or Firm:
BEIJING LINKAW PATENT ATTORNEY LAW FIRM (CN)
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