Title:
PRESSURE REGULATOR AND VIBRATION ISOLATOR
Document Type and Number:
WIPO Patent Application WO/2008/044712
Kind Code:
A1
Abstract:
A pressure regulator for controlling pressure with high response and high accuracy
even a flow fluctuation occurs on the downstream side. The pressure regulator
(1) regulates the rate of inflow into an isothermal pressure vessel (13) for the
gas supplied from a gas supply source (10) by means of a servo valve (11) to maintain
the constant pressure in the isothermal pressure vessel (13). Pressure control
means (a computer (16)) operating the servo valve (11) has as a main loop a pressure
control system for feedback-controlling the pressure in the isothermal pressure
vessel (13) measured by a pressure meter (14) and has therein a rate-of-inflow
control system for feedback-controlling the rate of inflow measured by a flow
meter (12), an observer for estimating the rate of outflow from the isothermal
pressure vessel (13) according to the rate of inflow and the derivative of the
pressure in the isothermal pressure vessel (13) measured by a pressure differentiator
(15), and a model follow-up control system for feed-backing the estimated rate
of outflow to the rate-of-inflow control system.
Inventors:
KAWASHIMA, Kenji (4259 Nagatsuta-cho Midori-ku, Yokohama-sh, Kanagawa 03, 2268503, JP)
川嶋 健嗣 (〒03 神奈川県横浜市緑区長津田町４２５９ 国立大学法人 東京工業大学内 Kanagawa, 2268503, JP)
KAGAWA, Toshiharu (4259 Nagatsuta-cho Midori-ku, Yokohama-sh, Kanagawa 03, 2268503, JP)
川嶋 健嗣 (〒03 神奈川県横浜市緑区長津田町４２５９ 国立大学法人 東京工業大学内 Kanagawa, 2268503, JP)
KAGAWA, Toshiharu (4259 Nagatsuta-cho Midori-ku, Yokohama-sh, Kanagawa 03, 2268503, JP)
Application Number:
JP2007/069774
Publication Date:
April 17, 2008
Filing Date:
October 10, 2007
Export Citation:
Assignee:
Tokyo Institute of Technology (2-12-1, Ookayama Meguro-k, Tokyo 50, 1528550, JP)
国立大学法人 東京工業大学 (〒50 東京都目黒区大岡山２－１２－１ Tokyo, 1528550, JP)
KAWASHIMA, Kenji (4259 Nagatsuta-cho Midori-ku, Yokohama-sh, Kanagawa 03, 2268503, JP)
川嶋 健嗣 (〒03 神奈川県横浜市緑区長津田町４２５９ 国立大学法人 東京工業大学内 Kanagawa, 2268503, JP)
国立大学法人 東京工業大学 (〒50 東京都目黒区大岡山２－１２－１ Tokyo, 1528550, JP)
KAWASHIMA, Kenji (4259 Nagatsuta-cho Midori-ku, Yokohama-sh, Kanagawa 03, 2268503, JP)
川嶋 健嗣 (〒03 神奈川県横浜市緑区長津田町４２５９ 国立大学法人 東京工業大学内 Kanagawa, 2268503, JP)
International Classes:
G05D16/02; F16F15/02; F16F15/023; G05B13/02; G05D19/02; G05D16/00; F16F15/02; F16F15/023; G05B13/02; G05D19/00
Attorney, Agent or Firm:
ISONO, Michizo (Annex 7-4 Hirakawa-cho 2-chome, Chiyoda-k, Tokyo 93, 1020093, JP)