Title:
PRESSURE SENSOR DEVICE AND FLUID CONTROL DEVICE HAVING BUILT-IN PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2007/086394
Kind Code:
A1
Abstract:
Provided are a pressure sensor device and a fluid control device having a built-in pressure sensor capable of realizing a compact integrated fluid control device in which a pressure sensor alone can be easily replaced. A pressure sensor device (21) includes: a first channel block (22) having a predetermined channel (22a); a second channel block (23) having a predetermined channel (23a) and opposing to the first channel block (22) at a predetermined interval; and a pressure sensor (24) arranged on an opposing surface of the first channel block (22) or the second channel block (23) for detecting the fluid pressure in an internal channel (23b). These components are integrated in a pressure regulator (16).
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Inventors:
SHIKATA, Izuru (3-2 Itachibori 2-chome Nishi-ku, Osaka-sh, Osaka 12, 5500012, JP)
四方 出 (〒12 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内 Osaka, 5500012, JP)
MAKINO, Megumu (3-2 Itachibori 2-chome Nishi-ku, Osaka-sh, Osaka 12, 5500012, JP)
牧野 恵 (〒12 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内 Osaka, 5500012, JP)
KOYOMOGI, Mutsunori (3-2 Itachibori 2-chome Nishi-ku, Osaka-sh, Osaka 12, 5500012, JP)
四方 出 (〒12 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内 Osaka, 5500012, JP)
MAKINO, Megumu (3-2 Itachibori 2-chome Nishi-ku, Osaka-sh, Osaka 12, 5500012, JP)
牧野 恵 (〒12 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内 Osaka, 5500012, JP)
KOYOMOGI, Mutsunori (3-2 Itachibori 2-chome Nishi-ku, Osaka-sh, Osaka 12, 5500012, JP)
Application Number:
JP2007/051039
Publication Date:
August 02, 2007
Filing Date:
January 24, 2007
Export Citation:
Assignee:
FUJIKIN INCORPORATED (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 5500012, JP)
株式会社フジキン (〒12 大阪府大阪市西区立売堀２丁目３番２号 Osaka, 5500012, JP)
TEM-TECH LAB. (28-25, Seta 1-chome Setagaya-k, Tokyo 95, 1580095, JP)
株式会社テムテック研究所 (〒95 東京都世田谷区瀬田１－２８－２５ Tokyo, 1580095, JP)
SHIKATA, Izuru (3-2 Itachibori 2-chome Nishi-ku, Osaka-sh, Osaka 12, 5500012, JP)
四方 出 (〒12 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内 Osaka, 5500012, JP)
MAKINO, Megumu (3-2 Itachibori 2-chome Nishi-ku, Osaka-sh, Osaka 12, 5500012, JP)
株式会社フジキン (〒12 大阪府大阪市西区立売堀２丁目３番２号 Osaka, 5500012, JP)
TEM-TECH LAB. (28-25, Seta 1-chome Setagaya-k, Tokyo 95, 1580095, JP)
株式会社テムテック研究所 (〒95 東京都世田谷区瀬田１－２８－２５ Tokyo, 1580095, JP)
SHIKATA, Izuru (3-2 Itachibori 2-chome Nishi-ku, Osaka-sh, Osaka 12, 5500012, JP)
四方 出 (〒12 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内 Osaka, 5500012, JP)
MAKINO, Megumu (3-2 Itachibori 2-chome Nishi-ku, Osaka-sh, Osaka 12, 5500012, JP)
International Classes:
G01L19/00; F16L41/03; G01L19/00; F16L41/02
Attorney, Agent or Firm:
HIBI, Norihiko et al. (3rd Floor Inaba Building, 13-18, Nishishinsaibashi 1-chome,, Chuo-k, Osaka-shi Osaka86, Osaka5420086, JP)
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