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Title:
PRESSURE SENSOR DEVICE AND FLUID CONTROL DEVICE HAVING BUILT-IN PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2007/086394
Kind Code:
A1
Abstract:
Provided are a pressure sensor device and a fluid control device having a built-in pressure sensor capable of realizing a compact integrated fluid control device in which a pressure sensor alone can be easily replaced. A pressure sensor device (21) includes: a first channel block (22) having a predetermined channel (22a); a second channel block (23) having a predetermined channel (23a) and opposing to the first channel block (22) at a predetermined interval; and a pressure sensor (24) arranged on an opposing surface of the first channel block (22) or the second channel block (23) for detecting the fluid pressure in an internal channel (23b). These components are integrated in a pressure regulator (16).

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Inventors:
SHIKATA IZURU (JP)
MAKINO MEGUMU (JP)
KOYOMOGI MUTSUNORI (JP)
TSUKADA MASAMORI (JP)
AIZAWA JUBEE (JP)
Application Number:
PCT/JP2007/051039
Publication Date:
August 02, 2007
Filing Date:
January 24, 2007
Export Citation:
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Assignee:
FUJIKIN KK (JP)
TEM TECH LAB (JP)
SHIKATA IZURU (JP)
MAKINO MEGUMU (JP)
KOYOMOGI MUTSUNORI (JP)
TSUKADA MASAMORI (JP)
AIZAWA JUBEE (JP)
International Classes:
G01L19/00; F16L41/03
Foreign References:
JP2005149075A2005-06-09
JP2001235099A2001-08-31
JPH10132692A1998-05-22
JPH0740175Y21995-09-13
JPH1026300A1998-01-27
JP2006083959A2006-03-30
Attorney, Agent or Firm:
HIBI, Norihiko et al. (3rd Floor Inaba Building, 13-18, Nishishinsaibashi 1-chome,, Chuo-k, Osaka-shi Osaka86, JP)
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