Title:
PRESSURE SENSOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2005/019789
Kind Code:
A1
Abstract:
This pressure sensor device comprises a thin sheet-like diaphragm (12) whose surface is formed with a strain resistance gauge, and a stop member (13) having a recess (14) forming a curve along the displacement forming surface of the diaphragm, with the recess facing the diaphragm. Particularly, the recess in the stop member is formed as a curved surface in which its depth (y) with respect to overpressure protection operating pressure (p) at a distance (x) from the center of the diaphragm is expressed by a quartic function [y = pr4(1-x2/r2)2/64D] where r is the radius, t is the thickness, and D is the bending rigidity of the diaphragm.
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Inventors:
YONEDA MASAYUKI (JP)
MIZOGUCHI JUN (JP)
KAJIO YASUHIRO (JP)
ISHIKAWA MASAYA (JP)
AZUMA YOUICHI (JP)
TSUCHIYA NAOHISA (JP)
MIZOGUCHI JUN (JP)
KAJIO YASUHIRO (JP)
ISHIKAWA MASAYA (JP)
AZUMA YOUICHI (JP)
TSUCHIYA NAOHISA (JP)
Application Number:
PCT/JP2004/012001
Publication Date:
March 03, 2005
Filing Date:
August 20, 2004
Export Citation:
Assignee:
YAMATAKE CORP (JP)
YONEDA MASAYUKI (JP)
MIZOGUCHI JUN (JP)
KAJIO YASUHIRO (JP)
ISHIKAWA MASAYA (JP)
AZUMA YOUICHI (JP)
TSUCHIYA NAOHISA (JP)
YONEDA MASAYUKI (JP)
MIZOGUCHI JUN (JP)
KAJIO YASUHIRO (JP)
ISHIKAWA MASAYA (JP)
AZUMA YOUICHI (JP)
TSUCHIYA NAOHISA (JP)
International Classes:
G01L9/00; G01L19/06; H01L29/84; G01L9/04; (IPC1-7): G01L9/04; G01L13/06; G01L19/06
Foreign References:
| JPS58180927A | 1983-10-22 | |||
| JPS5243474A | 1977-04-05 |
Attorney, Agent or Firm:
Nagato, Kanji (8-1 Shinbashi 5-chome, Minato-k, Tokyo 04, JP)
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