Title:
PRESSURE SENSOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/192660
Kind Code:
A1
Abstract:
A pressure sensor and a manufacturing method therefor. The pressure sensor comprises: an upper cover plate (10) having a first cover plate surface (103), wherein a cover plate through hole (102) is formed on the first cover plate surface (103) of the upper cover plate (10); a pressure-sensing film (20), the pressure-sensing film (20) having opposite first pressure-sensing surface (204) and second pressure-sensing surface (205), the first pressure-sensing surface (204) being attached to the first cover plate surface (103), wherein a first electrode (202) is formed on the second pressure-sensing surface (205), and the first electrode (202) at least partially corresponds to the cover plate through hole (102); and a substrate (30) having a first surface (305), the first surface (305) being joined to the second pressure-sensing surface (205), wherein a concave cavity (303) is formed at a position at which the first surface (305) corresponds to the cover plate through hole (102), a second electrode (304) is formed on the wall portion of the concave cavity (303), and the first electrode (202) and the second electrode (304) form two electrodes of a capacitor. The pressure sensor can reduce the resulting size and package size, and can also improve the medium compatibility.
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Inventors:
NIE YONGZHONG (CN)
Application Number:
PCT/CN2020/080926
Publication Date:
October 01, 2020
Filing Date:
March 24, 2020
Export Citation:
Assignee:
FATRI UNITED TESTING & CONTROL QUANZHOU TECH CO LTD (CN)
International Classes:
G01L9/14; G01L1/14
Foreign References:
| CN107389229A | 2017-11-24 | |||
| CN206891622U | 2018-01-16 | |||
| CN1672023A | 2005-09-21 | |||
| CN110044537A | 2019-07-23 | |||
| CN107003196A | 2017-08-01 | |||
| CN101680813A | 2010-03-24 | |||
| CN1550767A | 2004-12-01 | |||
| CN107076629A | 2017-08-18 | |||
| CN105899924A | 2016-08-24 | |||
| US20050183508A1 | 2005-08-25 | |||
| US5189916A | 1993-03-02 |
Attorney, Agent or Firm:
BEIJING EAST IP LTD. (CN)
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