Title:
PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/2010/150302
Kind Code:
A1
Abstract:
A pressure sensor (10) is to be used for detecting a pressure of gas. The pressure sensor (10) is provided with a metal member (20) which has a hole section (21) with one end opened and the other end bottomed for introducing gas; and a pressure detecting section (26) arranged at a position facing the bottom of the hole section (21) on an outer surface of the metal member (20). At least at the bottom of the hole section (21), a transmission suppressing film (28) for suppressing transmission of gas is formed.
Inventors:
MIYAMOTO, Taisuke (1 Toyota-cho, Toyota-sh, Aichi 71, 〒4718571, JP)
Application Number:
JP2009/002829
Publication Date:
December 29, 2010
Filing Date:
June 22, 2009
Export Citation:
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA (1 Toyota-cho, Toyota-shi Aichi, 71, 〒4718571, JP)
トヨタ自動車株式会社 (〒71 愛知県豊田市トヨタ町１番地 Aichi, 〒4718571, JP)
トヨタ自動車株式会社 (〒71 愛知県豊田市トヨタ町１番地 Aichi, 〒4718571, JP)
International Classes:
G01L19/06; G01L9/04
Attorney, Agent or Firm:
TOKKYO GYOMUHOJIN MEISEI INTERNATIONAL PATENT FIRM (Mitsui-Sumitomo Bank Bldg, 7th floor 18-19, Nishiki 2-chome, Naka-ku, Nagoya-sh, Aichi 03, 〒4600003, JP)