Title:
PRESSURE SENSOR AND METHOD FOR MANUFACTURING PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/022359
Kind Code:
A1
Abstract:
This pressure sensor is provided with: a housing section (20), which is attached to a subject (K1) to be measured, and which has a pressure introducing hole (21) for introducing measuring pressure; a seal section (30), which is provided to the housing section, and which performs sealing by being pressed to the subject; a diaphragm section (40) that warps by receiving the measuring pressure from the pressure introducing hole; and a sensor chip (60) that converts the warping of the diaphragm section into electric signals. The housing section, the sealing section, and the diaphragm section are configured as a hollow cylindrical single component (10) formed of a metal. The hardness of the single component varies by part, and the diaphragm section has the highest hardness. The diameter of the pressure introducing hole increases from the diaphragm section side of the housing section toward the seal section side by having steps.
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Inventors:
EZAKI TAKAHIRO (JP)
Application Number:
PCT/JP2016/068756
Publication Date:
February 09, 2017
Filing Date:
June 24, 2016
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01L9/00; G01L7/08; G01L19/14
Foreign References:
| JP5186725B2 | 2013-04-24 | |||
| JP3502807B2 | 2004-03-02 |
Attorney, Agent or Firm:
KIN Junhi (JP)
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