Title:
PRESSURE SENSOR AND METHOD FOR MANUFACTURING PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/022078
Kind Code:
A1
Abstract:
[Problem] To improve the reliability of a pressure sensor with respect to stress, for a pressure sensor having a plurality of electrodes arranged with gaps therebetween. [Solution] A pressure sensor 1 comprises: a first insulating base material 7; a common electrode 9 formed so as to expand across a principal surface of the first insulating base material 7; a second insulating base material 15 disposed to face the principal surface of the first insulating base material 7; a plurality of TFTs 30 disposed so as to be laid out on a principal surface of the second insulating base material 15 and facing the common electrode 9; a plurality of individual electrodes 31 provided on principal surfaces of the plurality of TFTs 30 on the first insulating base material 7 side, with each individual electrode connecting to one TFT 30 or two or more adjacent TFTs 30; a plurality of pressure-sensitive layers 33 respectively formed on the plurality of individual electrodes 31; and a second insulating film 27 provided on the principal surfaces of the plurality of TFTs 30. The second insulating film 27 has a plurality of openings 27A where the plurality of individual electrodes 31 are exposed, and the pressure-sensitive layers 33 are respectively provided in these openings 27A.
Inventors:
NADA HIDEAKI (JP)
Application Number:
PCT/JP2019/027456
Publication Date:
January 30, 2020
Filing Date:
July 11, 2019
Export Citation:
Assignee:
NISSHA CO LTD (JP)
International Classes:
G01L1/20; G01L5/00; H01L29/84
Foreign References:
| JP6316371B2 | 2018-04-25 | |||
| JP6325639B1 | 2018-05-16 |
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