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Patent Searching and Data


Title:
PRESSURE SENSOR AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2017/170456
Kind Code:
A1
Abstract:
Provided are a pressure sensor and a method for producing the same. The pressure sensor is provided with a silicon substrate 24 having a cavity 23, a diaphragm 21 that comprises metallic glass and is under tensile stress in a range such that the resonant frequency is higher than an audible range, and an opposing electrode 26 that is insulated from the diaphragm 21 and has a plurality of holes 25. The diaphragm 21 and opposing electrode 26 are disposed on the silicon substrate 24 so as to oppose each other with a gap therebetween. As a result of the release of the diaphragm 21 and opposing electrode 26 from the silicon substrate 24 caused by the cavity 23, the pressure sensor exhibits exceptional performance.

Inventors:
TANAKA Shuji (C/O TOHOKU UNIVERSITY, 2-1-1 Katahira, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
JOERG Froemel (C/O TOHOKU UNIVERSITY, 2-1-1 Katahira, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
Application Number:
JP2017/012492
Publication Date:
October 05, 2017
Filing Date:
March 27, 2017
Export Citation:
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Assignee:
TOHOKU UNIVERSITY (2-1-1, Katahira Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
International Classes:
G01L9/00; G01L9/12; G01L23/12; H04R7/04; H04R19/00; H04R19/04; H04R31/00
Foreign References:
JP4770605B22011-09-14
JP2008155333A2008-07-10
JP2004045048A2004-02-12
Attorney, Agent or Firm:
HIRAYAMA Kazuyuki (3rd Floor Bekkan, Ohashi Gyoen-Eki Bldg. 13-1, Shinjuku 1-chome, Shinjuku-k, Tokyo 22, 〒1600022, JP)
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