Title:
PRESSURE SENSOR USING AMORPHOUS ALLOY
Document Type and Number:
WIPO Patent Application WO/2019/039921
Kind Code:
A1
Abstract:
The present invention relates to a pressure sensor using an amorphous alloy, and a pressure sensor using an amorphous alloy according to an embodiment of the present invention comprises: a substrate at least partially made of an amorphous metal; an elastic film disposed on the substrate; and a pressure sensitive thin film disposed on the elastic film and at least partially made of an amorphous metal, wherein the critical strains of the substrate and the elastic film are equal to or greater than that of the pressure sensitive thin film.
Inventors:
PARK WON WOOK (KR)
LEE JE WON (KR)
SOHN KEUN YONG (KR)
MOON JI SEONG (KR)
KIM TAE HUN (KR)
PARK SEONG JUN (KR)
KIM JIN A (KR)
LEE JE WON (KR)
SOHN KEUN YONG (KR)
MOON JI SEONG (KR)
KIM TAE HUN (KR)
PARK SEONG JUN (KR)
KIM JIN A (KR)
Application Number:
PCT/KR2018/009839
Publication Date:
February 28, 2019
Filing Date:
August 24, 2018
Export Citation:
Assignee:
INJE UNIV INDUSTRY ACADEMIC COOPERATION FOUNDATION AND TECHNOLOGY (KR)
International Classes:
C22C45/00; C22C45/04; C22C45/08; C22C45/10; G03F7/20
Foreign References:
| KR20160140431A | 2016-12-07 | |||
| JPH06248399A | 1994-09-06 | |||
| JPH06200357A | 1994-07-19 | |||
| KR20010105084A | 2001-11-28 | |||
| JPS59132327A | 1984-07-30 |
Attorney, Agent or Firm:
KIM, Tae Sun (KR)
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