Title:
PRESSURE SENSOR USING CAPACITIVE COUPLING
Document Type and Number:
WIPO Patent Application WO/2005/054802
Kind Code:
A1
Abstract:
A pressure sensor capable of measuring pressure accurately, strong against noise, usable in any place, and using capacitive coupling. A sensor section used for a pressure sensor comprises a first electrode, a second electrode so provided as to be superposed over the first electrode, a third electrode so provided as to be superposed over the second electrode, a first dielectric layer interposed between the first and second electrodes, and a second dielectric layer interposed between the second and third electrodes and having an elastic modulus different from that of the first dielectric layer. A driving section drives the first and third electrodes. A detection section differentially detects the pressure exerted between the first and third electrodes from the signal generated by capacitive coupling from the second electrode.
Inventors:
OGAWA YASUJI (JP)
Application Number:
PCT/JP2004/016391
Publication Date:
June 16, 2005
Filing Date:
November 05, 2004
Export Citation:
Assignee:
XIROKU INC (JP)
OGAWA YASUJI (JP)
OGAWA YASUJI (JP)
International Classes:
G01L1/14; G01L5/00; (IPC1-7): G01L1/14; G01L5/00
Foreign References:
| JPH0278925A | 1990-03-19 | |||
| JPH0755615A | 1995-03-03 | |||
| JPH10142093A | 1998-05-29 |
Attorney, Agent or Firm:
Ishihara, Masanori (Miyamasuzaka ST Building 8-6, Shibuya 1-chom, Shibuya-ku Tokyo 02, JP)
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