Title:
PRESSURE SENSOR USING A FLEXIBLE SUBSTRATE, AND METHOD FOR MANUFACTURING A 5.1 CHANNEL MICROPHONE USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/078595
Kind Code:
A2
Abstract:
The present invention relates to a pressure sensor using a flexible substrate, and to a method for manufacturing a 5.1 channel microphone using same. More particularly, the present invention relates to a pressure sensor using a flexible substrate and a method for manufacturing a 5.1 channel microphone using same, wherein the pressure sensor comprises: a first substrate having a center on which silicon nanowires serving as a sensing unit are formed; an electrode layer formed on the first substrate, which is divided into two parts by the sensing unit; a membrane which is formed on the first substrate and coated into a structure for exposing the electrode layer; a flexible substrate which is formed on the membrane, and portions of which correspond to the electrode layer and the sensing unit, wherein said portions are removed through a photo-etching process; and a cap formed beneath the first substrate and which is abraded until the membrane of the sensing unit is exposed, so as to form a cavity for vacuum or reference pressure in the sensing unit.
Inventors:
JUNG, Suk Won (#113-602, Xi Apt. Cheongho-dong, Osan-si, Gyeonggi-do 447-330, 447-330, KR)
정석원 (경기도 오산시 청호동 321번지 자이아파트 113동 602호, 447-330 Gyeonggi-do, 447-330, KR)
LEE, Min Ho (#Gwangjang Apt, 28 Yeouido-dong, Yeongdeungpo-gu, Seoul 150-010, 150-010, KR)
이민호 (서울 영등포구 여의도동 28번지 광장아파트 8동 1001호, 150-010 Seoul, 150-010, KR)
LEE, Kook Nyung (# Jungang Heights Ville 1 Danji, Jeongneung 2-dong Seongbuk-gu, Seoul 136-779, 136-779, KR)
정석원 (경기도 오산시 청호동 321번지 자이아파트 113동 602호, 447-330 Gyeonggi-do, 447-330, KR)
LEE, Min Ho (#Gwangjang Apt, 28 Yeouido-dong, Yeongdeungpo-gu, Seoul 150-010, 150-010, KR)
이민호 (서울 영등포구 여의도동 28번지 광장아파트 8동 1001호, 150-010 Seoul, 150-010, KR)
LEE, Kook Nyung (# Jungang Heights Ville 1 Danji, Jeongneung 2-dong Seongbuk-gu, Seoul 136-779, 136-779, KR)
Application Number:
KR2010/009252
Publication Date:
June 30, 2011
Filing Date:
December 23, 2010
Export Citation:
Assignee:
KOREA ELECTRONICS TECHNOLOGY INSTITUTE (68 Yatap-dong, Bundang-gu Seongnam-si, Gyeonggi-do 463-816, 463-816, KR)
전자부품연구원 (경기도 성남시 분당구 야탑동 68번지, 463-816 Gyeonggi-do, 463-816, KR)
JUNG, Suk Won (#113-602, Xi Apt. Cheongho-dong, Osan-si, Gyeonggi-do 447-330, 447-330, KR)
정석원 (경기도 오산시 청호동 321번지 자이아파트 113동 602호, 447-330 Gyeonggi-do, 447-330, KR)
LEE, Min Ho (#Gwangjang Apt, 28 Yeouido-dong, Yeongdeungpo-gu, Seoul 150-010, 150-010, KR)
이민호 (서울 영등포구 여의도동 28번지 광장아파트 8동 1001호, 150-010 Seoul, 150-010, KR)
전자부품연구원 (경기도 성남시 분당구 야탑동 68번지, 463-816 Gyeonggi-do, 463-816, KR)
JUNG, Suk Won (#113-602, Xi Apt. Cheongho-dong, Osan-si, Gyeonggi-do 447-330, 447-330, KR)
정석원 (경기도 오산시 청호동 321번지 자이아파트 113동 602호, 447-330 Gyeonggi-do, 447-330, KR)
LEE, Min Ho (#Gwangjang Apt, 28 Yeouido-dong, Yeongdeungpo-gu, Seoul 150-010, 150-010, KR)
이민호 (서울 영등포구 여의도동 28번지 광장아파트 8동 1001호, 150-010 Seoul, 150-010, KR)
International Classes:
G01L7/08; G01L9/00; H04R19/04
Attorney, Agent or Firm:
NAM, Choong Woo et al. (3F Kyungbin Building 517-18, Dogok-dong Gangnam-gu, Seoul 135-854, 135-854, KR)
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