Title:
PRESSURE SENSOR USING MEMS RESONATOR
Document Type and Number:
WIPO Patent Application WO/2013/132746
Kind Code:
A1
Abstract:
A pressure sensor (400) has: a MEMS resonator (500); a sweep unit (401) that outputs an excitation signal to the MEMS resonator while sweeping frequencies of the excitation signal along a prescribed sweep direction across a prescribed frequency range that includes therein a resonant frequency (f0) of an oscillator (101; 101x; 501; 501x; 801) for the MEMS resonator; and integrating unit (414) that inputs and oscillation state information signal which is a characteristic quantity expressing the oscillation state of the oscillator from the MEMS resonator in this sweep, integrates a plurality of oscillation state information signals when frequencies for the excitation signals differ from each other, and outputs the integrated value; and a conversion unit (415) that determines the pressure used on the MEMS resonator on the basis of the integrated value.
Inventors:
NAKAMURA KUNIHIKO
Application Number:
PCT/JP2013/000742
Publication Date:
September 12, 2013
Filing Date:
February 12, 2013
Export Citation:
Assignee:
PANASONIC CORP (JP)
International Classes:
G01L21/22; G01L9/00
Foreign References:
| JPH1123313A | 1999-01-29 | |||
| JPH034090B2 | 1991-01-22 | |||
| JP2010127795A | 2010-06-10 | |||
| JP2007171059A | 2007-07-05 |
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
Mutsumi Sameshima (JP)
Mutsumi Sameshima (JP)
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Claims: