PRESSURE SENSOR

WIPO Patent Application WO/1995/008756

A1

A pressure sensor in which drift is not generated, which can be fabricated easily from a small number of components, and whose diaphragm, sensor unit, and supporting member having a threaded edge are integrated in one module. The sensor includes a sensor module M which is provided with a diaphragm (1) in which stress is generated when a pressure p is exerted on the pressure receiving surface (1a); a sensor unit (2) having a bridge pattern made up of patterns (R1 to R4) each having two resistors arranged in the tensioning portion T and compressing portion, respectively, on the back side (1b) of the pressure receiving surface (1a); and a supporting member (3) one end (3a) of which supports the circumference of the diaphragm (1) integrally, which has a threaded portion (31) on the intermediate circumference, and has a pressure introducing hole (33) leading to the pressure receiving surface (1a) and a circumferential thread (32) at the other end. The two resistors of each resistor pattern (R1 to R4) are paired, and connected to each other in series. The resistor patterns (R1 to R4) have the same pattern, and shifted from each other by an angle of approximately 90� around the diaphragm.

TABATA AKI (JP)
SUZUKI NATSUSHI (JP)
SUZUKI NORITAKE (JP)
HATA YASUHIKO (JP)

PCT/JP1993/001344

March 30, 1995

September 20, 1993

Click for automatic bibliography generation  

KOMATSU MFG CO LTD (JP)
TABATA AKI (JP)
SUZUKI NATSUSHI (JP)
SUZUKI NORITAKE (JP)
HATA YASUHIKO (JP)

G01L9/00; (IPC1-7): G01L9/04

JPH0239574A	1990-02-08
JPH0262928A	1990-03-02
JPH04247667A	1992-09-03
JPS62222137A	1987-09-30
JPS6381238A	1988-04-12

View/Download PDF      PDF Help

Previous Patent: RADIATION ARRANGEMENT WITH REFLECTOR BODY AND ITS USE

Next Patent: SUSPENDED DIAPHRAGM PRESSURE SENSOR