Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/1995/008756
Kind Code:
A1
Abstract:
A pressure sensor in which drift is not generated, which can be fabricated easily from a small number of components, and whose diaphragm, sensor unit, and supporting member having a threaded edge are integrated in one module. The sensor includes a sensor module M which is provided with a diaphragm (1) in which stress is generated when a pressure p is exerted on the pressure receiving surface (1a); a sensor unit (2) having a bridge pattern made up of patterns (R1 to R4) each having two resistors arranged in the tensioning portion T and compressing portion, respectively, on the back side (1b) of the pressure receiving surface (1a); and a supporting member (3) one end (3a) of which supports the circumference of the diaphragm (1) integrally, which has a threaded portion (31) on the intermediate circumference, and has a pressure introducing hole (33) leading to the pressure receiving surface (1a) and a circumferential thread (32) at the other end. The two resistors of each resistor pattern (R1 to R4) are paired, and connected to each other in series. The resistor patterns (R1 to R4) have the same pattern, and shifted from each other by an angle of approximately 90� around the diaphragm.
Inventors:
TABATA AKI (JP)
SUZUKI NATSUSHI (JP)
SUZUKI NORITAKE (JP)
HATA YASUHIKO (JP)
SUZUKI NATSUSHI (JP)
SUZUKI NORITAKE (JP)
HATA YASUHIKO (JP)
Application Number:
PCT/JP1993/001344
Publication Date:
March 30, 1995
Filing Date:
September 20, 1993
Export Citation:
Assignee:
KOMATSU MFG CO LTD (JP)
TABATA AKI (JP)
SUZUKI NATSUSHI (JP)
SUZUKI NORITAKE (JP)
HATA YASUHIKO (JP)
TABATA AKI (JP)
SUZUKI NATSUSHI (JP)
SUZUKI NORITAKE (JP)
HATA YASUHIKO (JP)
International Classes:
G01L9/00; (IPC1-7): G01L9/04
Foreign References:
JPH0239574A | 1990-02-08 | |||
JPH0262928A | 1990-03-02 | |||
JPH04247667A | 1992-09-03 | |||
JPS62222137A | 1987-09-30 | |||
JPS6381238A | 1988-04-12 |
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