PRESSURE SENSOR - MITSUBISHI ELECTRIC CORP

Title:

PRESSURE SENSOR

Document Type and Number:

WIPO Patent Application WO/2002/010703

Kind Code:

A1

Abstract:

A pressure sensor comprises a diaphragm (6) with a first pressure-sensitive surface, a first thermal detector (3) having a heat-sensitive resistor opposed to a central portion of the diaphragm with a spacer (7), and a second thermal detector having a heat-sensitive resistor opposed to a diaphragm portion where a pressure change causes little or no displacement. The difference between the signals from the first sensor for pressure measurement and the second sensor for reference output is amplified and provided as output. The diaphragm area opposed to the second sensor (8) and the diaphragm area opposed to the first sensor (3) have the same film thickness, and the change in output with abrupt change in ambient temperature is fairly small, allowing pressure measurements with high accuracy.

Inventors:

YUTANI NAOKI (JP)
OHJI HIROSHI (JP)
TSUTSUMI KAZUHIKO (JP)

Application Number:

PCT/JP2000/005124

Publication Date:

February 07, 2002

Filing Date:

July 31, 2000

Export Citation:

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Assignee:

MITSUBISHI ELECTRIC CORP (JP)
YUTANI NAOKI (JP)
OHJI HIROSHI (JP)
TSUTSUMI KAZUHIKO (JP)

International Classes:

G01L11/00; (IPC1-7): G01L11/00

Foreign References:

EP0435611A2	1991-07-03
JPH06241933A	1994-09-02
US4682503A	1987-07-28
US4320664A	1982-03-23

Other References: