Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/080759
Kind Code:
A1
Abstract:
The purpose of the present invention is to obtain a pressure sensor having a small variation in sensor characteristics.
This pressure sensor has a diaphragm having a shape having longitudinal and lateral directions, and also has four strain gages provided on the diaphragm. The four strain gages are arranged at the center of the diaphragm in such a manner that two of the four strain gages are arranged along the lateral direction and the remaining two gages are arranged along the longitudinal direction.
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Inventors:
KAZAMA ATSUSHI (JP)
OTA HIROYUKI (JP)
HASHIZUME JIRO (JP)
ONOZUKA JUNJI (JP)
ONUKI HIROSHI (JP)
TOBITA MIHO (JP)
OTA HIROYUKI (JP)
HASHIZUME JIRO (JP)
ONOZUKA JUNJI (JP)
ONUKI HIROSHI (JP)
TOBITA MIHO (JP)
Application Number:
PCT/JP2013/079950
Publication Date:
May 30, 2014
Filing Date:
November 06, 2013
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01L9/00; H01L29/84
Foreign References:
| JPH01211986A | 1989-08-25 | |||
| JP2006003100A | 2006-01-05 | |||
| JPH08247872A | 1996-09-27 | |||
| JP4161410B2 | 2008-10-08 | |||
| JPH098329A | 1997-01-10 | |||
| JP2615887B2 | 1997-06-04 | |||
| JP4161410B2 | 2008-10-08 |
Other References:
See also references of EP 2924408A4
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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