Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/112350
Kind Code:
A1
Abstract:
A pressure sensor has a container including a cylinder section and a closing section, and also has a first vibrator. The cylinder section has an open end and also has a hollow hole provided inside the cylinder section, the hollow hole allowing fluid to be introduced therein from the open end. The closing section closes the cylinder section. The first vibrator is provided to the outer surface of the cylinder section at a position closer to the closing section than the open end. The natural vibration frequency of the first vibrator varies according to the strain of the outer surface of the cylinder section caused by the pressure of the fluid having been introduced into the hollow hole. The first vibrator outputs a signal corresponding to a change in the natural vibration frequency.
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| WO/2009/156308 | SEMICONDUCTOR CHIP ARRANGEMENT WITH SENSOR CHIP AND MANUFACTURING METHOD |
| JPH08159904 | PRESSURE CONVERTER |
Inventors:
FUJII KENJI
OGATA MOTOKI
TAKEKAWA ATSUO
OGATA MOTOKI
TAKEKAWA ATSUO
Application Number:
PCT/JP2014/000108
Publication Date:
July 24, 2014
Filing Date:
January 14, 2014
Export Citation:
Assignee:
PANASONIC CORP (JP)
International Classes:
G01L9/00
Foreign References:
| US20080289431A1 | 2008-11-27 | |||
| JP2012510630A | 2012-05-10 | |||
| JPS60138431A | 1985-07-23 | |||
| US4512198A | 1985-04-23 | |||
| JP2004053344A | 2004-02-19 | |||
| JP2012118057A | 2012-06-21 | |||
| JPH06347284A | 1994-12-20 | |||
| JPH098328A | 1997-01-10 |
Attorney, Agent or Firm:
TOKUDA, Yoshiaki et al. (JP)
Yoshiaki Tokuda (JP)
Yoshiaki Tokuda (JP)
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