Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/076158
Kind Code:
A1
Abstract:
This invention minimizes variations in sensor characteristics due to strain-gauge misalignment and variations in sensor output due to temperature variations in a pressure sensor having a structure in which strain gauges are formed on top of a diaphragm. In said pressure sensor, in which a sensor chip on which four strain gauges that have the same characteristics and constitute a bridge circuit are formed is positioned on top of a diaphragm that has a long direction and a short direction and said bridge circuit is used to detect an output voltage proportional to pressure applied to the diaphragm, the four strain gauges are laid out next to each other near the center of the diaphragm, with two parallel to the short direction and the other two parallel to the long direction, and the diaphragm has a thin section in the long direction from the sensor chip.
Inventors:
KAZAMA ATSUSHI (JP)
ONOZUKA JUNJI (JP)
ONUKI HIROSHI (JP)
TOBITA MIHO (JP)
HIO MASAYUKI (JP)
ONOZUKA JUNJI (JP)
ONUKI HIROSHI (JP)
TOBITA MIHO (JP)
HIO MASAYUKI (JP)
Application Number:
PCT/JP2014/079910
Publication Date:
May 28, 2015
Filing Date:
November 12, 2014
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01L9/00
Foreign References:
| JP5186725B2 | 2013-04-24 | |||
| JP2013011478A | 2013-01-17 | |||
| JP2615887B2 | 1997-06-04 | |||
| JP4161410B2 | 2008-10-08 |
Other References:
See also references of EP 3073237A4
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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