Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/133101
Kind Code:
A1
Abstract:
A pressure sensor is provided with: a first substrate (10) in which first and second diaphragm portions (15a, 15b) are formed on one surface side by first and second recessed portions (14a, 14b) in the other surface, respectively; first and second detection elements (16a, 16b) on the first and second diaphragm portions; a second substrate (30) which forms a first reference pressure chamber (40) with the one surface of the first substrate therebetween; a third substrate (50) which seals the second recessed portion to form a second reference pressure chamber (60); and a calculation device (90) which calculates an offset value from a difference between an inspection signal and a reference signal, and detects a measurement medium pressure on the basis of a difference between a detection signal and the offset value, the detection signal or the inspection signal that corresponds to a difference between the measurement medium pressure or a reference medium pressure in the first recessed portion and a first reference pressure being outputted from the first detection element, and the reference signal that corresponds to a difference between the first and second reference pressures being outputted from the second detection element (16b).
Inventors:
OONO KAZUYUKI (JP)
Application Number:
PCT/JP2015/001017
Publication Date:
September 11, 2015
Filing Date:
February 27, 2015
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01L9/00; H01L29/84
Foreign References:
| JPH0447244A | 1992-02-17 | |||
| US4790192A | 1988-12-13 |
Attorney, Agent or Firm:
KIN, Junhi (JP)
Gold Junki (JP)
Gold Junki (JP)
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