Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/110270
Kind Code:
A1
Abstract:
In order to more easily perform calibration of a sensor output from a pressure sensor, which is performed due to occurrence of deposition: a resonance point measurement unit (122) obtains a resonance point of a diaphragm (112) on the basis of a result, which is obtained through measurement of a constant pressure by using the pressure sensor while varying the power supply frequency; a characteristic calculation unit (123) calculates, on the basis of the measured resonance point, the elastic modulus of the diaphragm (112) at a time point of the measurement of the resonance point; and a correction unit (124) calculates a corrected sensor sensitivity which is obtained by correcting the sensor sensitivity of a sensor chip (101) on the basis of the elastic modulus obtained by the characteristic calculation unit (123).
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Inventors:
TOCHIGI HIDENOBU (JP)
ISHIHARA TAKUYA (JP)
ISHIHARA TAKUYA (JP)
Application Number:
PCT/JP2016/082926
Publication Date:
June 29, 2017
Filing Date:
November 07, 2016
Export Citation:
Assignee:
AZBIL CORP (JP)
International Classes:
G01L27/02; G01L9/00; G01L9/12
Foreign References:
| JP2007086002A | 2007-04-05 | |||
| JP2013124947A | 2013-06-24 | |||
| JP2005337924A | 2005-12-08 |
Attorney, Agent or Firm:
YAMAKAWA,Shigeki et al. (JP)
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