Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/051760
Kind Code:
A1
Abstract:
[Problem] To broaden a pressure measurement range within which an accurate measurement can be achieved by a pressure detection sensor having electrodes disposed to be spaced apart from each other. [Solution] This pressure sensor 1 is provided with a common electrode 9, a plurality of individual electrodes 31, a plurality of thin film transistors 30, and a depressurization layer 11. The common electrode 9 is spread over one surface. The plurality of individual electrodes 31 face the common electrode 9 and are provided in a matrix shape. The plurality of thin film transistors 30 correspond to the plurality of individual electrodes 31 and are provided on the side opposite to the common electrode 9 of the plurality of individual electrodes 31, and at least one or two neighboring thin film transistors are connected to one individual electrode 31. The depressurization layer 11 is laminated on the surface of the common electrode 9 at the sides of the plurality of individual electrodes 31. The plurality of individual electrodes 31 include first electrodes 31X and second electrodes 31Y which are thicker than the first electrodes 31X, and therefore have smaller gaps from the depressurization layer 11 than the first electrodes 31X.
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Inventors:
NADA HIDEAKI (JP)
MORITA JUMPEI (JP)
MORITA JUMPEI (JP)
Application Number:
PCT/JP2017/030396
Publication Date:
March 22, 2018
Filing Date:
August 24, 2017
Export Citation:
Assignee:
NISSHA CO LTD (JP)
International Classes:
G01L5/00
Foreign References:
| JP2014035227A | 2014-02-24 | |||
| JP2013068563A | 2013-04-18 | |||
| JP2015531877A | 2015-11-05 | |||
| US20090027352A1 | 2009-01-29 |
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