Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/055954
Kind Code:
A1
Abstract:
A purpose of the present invention is to provide a pressure sensor that uses a pressure detection element, said pressure detection element using the piezoresistive effect or similar, wherein the pressure sensor reduces warping of the pressure detection element due to temperature changes, and allows accuracy to be increased and temperature responsiveness to be improved. A pressure sensor (100) according to the present invention comprises: a pressure detection element (126) that detects the pressure of a fluid; a support member (125) that supports the pressure detection element (126); and an adhesive layer (125A) that is formed by applying an adhesive, and adheres and fixes the pressure detection element (126) and the support member (125), said pressure sensor being characterized in that a protrusion (125a) having a prescribed height is provided to the center of a surface of the support member (125), to which surface the pressure detection element (126) is fixed, in order to maintain the adhesive layer (125A) at a prescribed thickness.
More Like This:
| JPH055665 | PRESSURE SENSOR IN CYLINDER |
| JP2001116644 | SEMICONDUCTOR TYPE SENSOR |
| JP6507595 | Semiconductor sensor device |
Inventors:
TAKIMOTO KAZUYA (JP)
MORITA MASAHIRO (JP)
SAKAI RIHITO (JP)
TANAKA TATSUYA (JP)
MORITA MASAHIRO (JP)
SAKAI RIHITO (JP)
TANAKA TATSUYA (JP)
Application Number:
PCT/JP2017/029309
Publication Date:
March 29, 2018
Filing Date:
August 14, 2017
Export Citation:
Assignee:
SAGINOMIYA SEISAKUSHO INC (JP)
International Classes:
G01L9/00
Domestic Patent References:
| WO2015115367A1 | 2015-08-06 |
Foreign References:
| JP2001201415A | 2001-07-27 | |||
| JP2012127781A | 2012-07-05 | |||
| JP2006308399A | 2006-11-09 | |||
| US20020029639A1 | 2002-03-14 |
Attorney, Agent or Firm:
TANI & ABE, P.C. (JP)
Download PDF:
Previous Patent: PRESSURE SENSOR
Next Patent: NON-AQUEOUS ELECTROLYTE SECONDARY BATTERY POSITIVE ELECTRODE
Next Patent: NON-AQUEOUS ELECTROLYTE SECONDARY BATTERY POSITIVE ELECTRODE