Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/220772
Kind Code:
A1
Abstract:
This pressure sensor 40 has: a base member 12; a membrane 18 arranged to be spaced apart a distance from the base member 12; a first fixed electrode 14 that is provided on the base member 12 so as to face the membrane 18 and is provided with a dielectric layer 24; and a second fixed electrode 16 provided on the base member 12 so as to face the membrane 18. When a pressure Pin acting against the membrane 18 increases so that the membrane 18 bends toward the base member 12, the membrane 18 comes into contact with the dielectric layer 24 of the first fixed electrode 14 before the distance between the membrane 18 and the second fixed electrode 16 becomes constant.
Inventors:
HAMAZAKI RYOHEI (JP)
TSUJI DAIKI (JP)
TSUJI DAIKI (JP)
Application Number:
PCT/JP2019/011861
Publication Date:
November 21, 2019
Filing Date:
March 20, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01L9/00; H01L29/84
Foreign References:
| JP2007303922A | 2007-11-22 | |||
| JPH07174652A | 1995-07-14 | |||
| JP2005331328A | 2005-12-02 | |||
| JP2005326293A | 2005-11-24 | |||
| JPH08271364A | 1996-10-18 | |||
| KR101489302B1 | 2015-02-04 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
Download PDF: