Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/184206
Kind Code:
A1
Abstract:
This pressure sensor 10 has: a base substrate 12; a first insulation layer 14 provided to the base substrate 12; a fixed electrode 16 provided to the first insulation layer 14; a side wall portion 18 which is provided to the first insulation layer 14 so as to enclose the fixed electrode 16; and a conductive membrane 20 which is disposed so as to oppose the fixed electrode 16 across a gap and which is supported by the side wall portion 18. The side wall portion 18 is provided with: a shield electrode 24 disposed on the first insulation layer 14; and a second insulation layer 26 disposed on the shield electrode 24. The distance L1 between the fixed electrode 16 and the membrane 20 is smaller than the distance L2 between the shield electrode 24 and the membrane 20.
Inventors:
NIWA RYOSUKE (JP)
YOSHIDA KOICHI (JP)
YOSHIDA KOICHI (JP)
Application Number:
PCT/JP2020/008127
Publication Date:
September 17, 2020
Filing Date:
February 27, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01L9/00; H01L29/84
Foreign References:
| JP2017506329A | 2017-03-02 | |||
| US20170315008A1 | 2017-11-02 | |||
| JP2016526170A | 2016-09-01 | |||
| JP2005227182A | 2005-08-25 | |||
| JP2007295516A | 2007-11-08 | |||
| US20050262947A1 | 2005-12-01 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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