Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/184434
Kind Code:
A1
Abstract:
[Problem] To provide a pressure sensor configured to prevent the problem of the tearing or cracking of an insulating film for insulating between a stem and a detection circuit from occurring. [Solution] A pressure sensor, including: a stem having a planar outer bottom surface, an outer side surface extending in a direction intersecting the outer bottom surface, and a pressure receiving inner surface that is the opposite surface to the outer bottom surface and receives pressure from a fluid to be measured; and a detection circuit provided to the outer bottom surface with an insulating film interposed therebetween. The stem has a foot part that: is formed so as to surround the outer bottom surface; is constituted of a surface which, when observed from a direction that is parallel to the outer bottom surface, faces a direction different from the direction of the outer bottom surface and the outer side surface; and connects between the outer bottom surface and the outer side surface. The insulating film covers at least a portion of the foot part.
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Inventors:
KOBAYASHI MASANORI (JP)
UNNO KEN (JP)
UNNO KEN (JP)
Application Number:
PCT/JP2020/009673
Publication Date:
September 17, 2020
Filing Date:
March 06, 2020
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
G01L19/00
Foreign References:
| JP2011164072A | 2011-08-25 | |||
| JP2006010623A | 2006-01-12 | |||
| JPH05129636A | 1993-05-25 | |||
| US20180080844A1 | 2018-03-22 | |||
| JPH0513782A | 1993-01-22 |
Other References:
See also references of EP 3940359A4
Attorney, Agent or Firm:
MAEDA & SUZUKI (JP)
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