Title:
PRESSURE SENSORS WITH TENSIONED MEMBRANES
Document Type and Number:
WIPO Patent Application WO/2017/180670
Kind Code:
A3
Abstract:
Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.
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Inventors:
SCHMIDT SIEGMAR (US)
DAI WILLIAM A (US)
NG BOON KHAI (US)
DAI WILLIAM A (US)
NG BOON KHAI (US)
Application Number:
PCT/US2017/027074
Publication Date:
November 23, 2017
Filing Date:
April 11, 2017
Export Citation:
Assignee:
THE ALFRED E MANN FOUNDATION FOR SCIENT RESEARCH (US)
International Classes:
G01L9/00; G01L19/04; G01L19/06; G01L19/14
Foreign References:
| US20130062710A1 | 2013-03-14 | |||
| US20070201710A1 | 2007-08-30 |
Other References:
XIUCHUN HAO ET AL: "An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor", SENSORS, vol. 12, no. 12, 11 June 2012 (2012-06-11), pages 8026 - 8038, XP055382819, DOI: 10.3390/s120608026
Attorney, Agent or Firm:
CUSHMAN, Cameron A. (US)
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