Title:
PRESSURE TRANSDUCER WITH STRUCTURAL TEMPERATURE AND MISALIGNMENT COMPENSATION
Document Type and Number:
WIPO Patent Application WO2005001408
Kind Code:
A3
Abstract:
One aspect is a pressure transducer package (4) comprising a housing, a diaphragm (20), a support (32) disposed in the housing and a sensing element (30) disposed in the housing between the diaphragm and the support so that the pressure from the environment acts on the diaphragm to compress the sensing element. The sensing element comprises at least one substrate having a coefficient of thermal expansion greater than 4 ppm/k , e.g. sappphire. In another aspect, the sensing element comprises at least one substrate formed of a first material, e.g. sappphire and an epitaxial layer of a second material e.g silicon or gallium nitride having a lower coefficient of thermal expansion. In a further aspect, the support (32) abuts the housing at a spherically-shaped interface (52,64) to compensate for misalignment between the support (32) and the sensing element (30) to ensure that the sensing element is evenly loaded.
Inventors:
BARRON LEO (US)
Application Number:
PCT/US2004/016145
Publication Date:
March 24, 2005
Filing Date:
May 24, 2004
Export Citation:
Assignee:
DYNISCO INSTR INC (US)
BARRON LEO (US)
BARRON LEO (US)
International Classes:
G01L9/00; G01L19/04; (IPC1-7): G01L9/00; G01L19/04; G01L19/14
Foreign References:
| US5088329A | 1992-02-18 | |||
| EP0855585A2 | 1998-07-29 | |||
| US5583295A | 1996-12-10 | |||
| EP0336437A2 | 1989-10-11 | |||
| US4127840A | 1978-11-28 | |||
| EP0352773A2 | 1990-01-31 | |||
| US5249468A | 1993-10-05 |
Other References:
See also references of EP 1639335A2
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