PRESSURE-TYPE FLOW CONTROL DEVICE AND METHOD FOR PREVENTING OVERSHOOTING AT START OF FLOW CONTROL PERFORMED BY SAID DEVICE

WIPO Patent Application WO/2015/111391

A1

　This pressure-type flow control device is provided with: a main body provided with a fluid channel via which a fluid inlet and a fluid outlet communicate, and an exhaust channel via which the fluid channel and an exhaust outlet communicate; a pressure control valve for opening/closing the upstream side of the fluid channel, the pressure control valve being fixed to the fluid inlet side of the main body; a first pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the pressure control valve; an orifice provided in the fluid channel downstream of a branching location on the exhaust channel; a switching valve for opening/closing the fluid channel on the downstream side of the first pressure sensor; and an exhaust valve for opening/closing the exhaust channel. Operating the exhaust valve and forcibly exhausting the interior of the fluid channel space between the pressure control valve and the switching valve the pressure-type flow control device starts to perform flow control makes it possible to prevent overshooting at the start of flow control.

HIRATA KAORU (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
SUGITA KATSUYUKI (JP)
NAGASE MASAAKI (JP)

PCT/JP2015/000154

July 30, 2015

January 15, 2015

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FUJIKIN KK (JP)

G05D7/06; F16K31/02

WO2009141947A1

2009-11-26

JPH08338546A	1996-12-24
JPH1055218A	1998-02-24
JP2003195948A	2003-07-11
JP2006330851A	2006-12-07
JPS6328875A	1988-02-06
JPH109996A	1998-01-16

TANIDA, Ryuichi et al. (JP)
Ryuichi Yata (JP)

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