Title:
PRESSURE-TYPE FLOW RATE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/067877
Kind Code:
A1
Abstract:
Disclosed is a high temperature gas-use pressure-type flow rate control device capable of performing high precision flow rate control with an error margin of less than or equal to 1.0% F.S. using a conventional temperature detector even with a high-temperature gas of a temperature of between 100° C to 500° C. The pressure-type flow rate control device comprises a valve body (VD) wherein flow passageways (15 and 16) have been formed; a valve unit (V) interposed between the flow passageways; a valve drive unit (PE and 21) for driving the valve unit (V) to open and close the flow passageways; an orifice provided on a downstream side of the valve unit of the flow passageways; a temperature detector (TC) for detecting the gas temperature between the valve unit and the orifice; a pressure detector (P) for detecting the gas pressure between the valve unit and the orifice; and a calculation and control unit for calculating a gas flow rate flowing through the orifice on the basis of each detected value of the temperature detector and the pressure detector, while controlling the valve drive unit; wherein the temperature detector (TC) has been inserted into a mounting hole drilled from a top side of the valve body inwardly toward the same at a position directly above the exit-side flow passageway between the valve unit and the orifice.
Inventors:
HIDAKA, Atsushi (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
日高敦志 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)
NAGASE, Masaaki (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
永瀬正明 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)
DOHI, Ryousuke (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
日高敦志 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)
NAGASE, Masaaki (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
永瀬正明 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)
DOHI, Ryousuke (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
Application Number:
JP2010/004859
Publication Date:
June 09, 2011
Filing Date:
August 02, 2010
Export Citation:
Assignee:
FUJIKIN INCORPORATED (3-2 Itachibori 2-chome, Nishi-ku Osaka-sh, Osaka 12, 〒5500012, JP)
株式会社フジキン (〒12 大阪府大阪市西区立売堀２丁目３番２号 Osaka, 〒5500012, JP)
HIDAKA, Atsushi (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
日高敦志 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)
NAGASE, Masaaki (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
永瀬正明 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)
株式会社フジキン (〒12 大阪府大阪市西区立売堀２丁目３番２号 Osaka, 〒5500012, JP)
HIDAKA, Atsushi (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
日高敦志 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)
NAGASE, Masaaki (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
永瀬正明 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)
International Classes:
G05D7/06; G01F1/00; G01F1/50
Attorney, Agent or Firm:
SUGIMOTO, Takeo et al. (Kitahama-Gate Bldg, 1-21 Kitahama 2-chome, Chuo-ku, Osaka-sh, Osaka 41, 〒5410041, JP)
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