Title:
PRESSURE-TYPE FLOW RATE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/067877
Kind Code:
A1
Abstract:
Disclosed is a high temperature gas-use pressure-type flow rate control device capable of performing high precision flow rate control with an error margin of less than or equal to 1.0% F.S. using a conventional temperature detector even with a high-temperature gas of a temperature of between 100° C to 500° C. The pressure-type flow rate control device comprises a valve body (VD) wherein flow passageways (15 and 16) have been formed; a valve unit (V) interposed between the flow passageways; a valve drive unit (PE and 21) for driving the valve unit (V) to open and close the flow passageways; an orifice provided on a downstream side of the valve unit of the flow passageways; a temperature detector (TC) for detecting the gas temperature between the valve unit and the orifice; a pressure detector (P) for detecting the gas pressure between the valve unit and the orifice; and a calculation and control unit for calculating a gas flow rate flowing through the orifice on the basis of each detected value of the temperature detector and the pressure detector, while controlling the valve drive unit; wherein the temperature detector (TC) has been inserted into a mounting hole drilled from a top side of the valve body inwardly toward the same at a position directly above the exit-side flow passageway between the valve unit and the orifice.
Inventors:
HIDAKA ATSUSHI (JP)
NAGASE MASAAKI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
NAGASE MASAAKI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
Application Number:
PCT/JP2010/004859
Publication Date:
June 09, 2011
Filing Date:
August 02, 2010
Export Citation:
Assignee:
FUJIKIN KK (JP)
HIDAKA ATSUSHI (JP)
NAGASE MASAAKI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
HIDAKA ATSUSHI (JP)
NAGASE MASAAKI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
International Classes:
G05D7/06; G01F1/00; G01F1/50
Foreign References:
| JP2000259255A | 2000-09-22 | |||
| JP2009245132A | 2009-10-22 | |||
| JPH09297070A | 1997-11-18 | |||
| JP2007057474A | 2007-03-08 | |||
| JPH03230204A | 1991-10-14 | |||
| JP2009176942A | 2009-08-06 |
Attorney, Agent or Firm:
SUGIMOTO, Takeo et al. (JP)
Takeo Sugimoto (JP)
Takeo Sugimoto (JP)
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