Title:
PRINTED CIRCUIT BOARD INSPECTION APPARATUS AND METHOD USING ELECTRON BEAM
Document Type and Number:
WIPO Patent Application WO/2017/026789
Kind Code:
A1
Abstract:
The present invention relates to a printed circuit board inspection apparatus for inspecting a hole machined on a printed circuit board. Disclosed are a printed circuit board inspection apparatus and a printed circuit board inspection method using the same, the apparatus comprising: an electron beam scanning unit, provided at one side of the printed circuit board, for scanning a hole, to be inspected, of the printed circuit board with an electron beam; an electric current detection plate provided at the other side of the printed circuit board; and a detection unit connected to the electric current detection plate, and detecting a machined state of the hole, to be inspected, by means of the electric current generated when the electron beam, having passed through the hole to be inspected, arrives at the electric current detection plate.
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Inventors:
LIM SUN-JONG (KR)
Application Number:
PCT/KR2016/008783
Publication Date:
February 16, 2017
Filing Date:
August 10, 2016
Export Citation:
Assignee:
KOREA MACH & MATERIALS INST (KR)
International Classes:
G01R31/306; G01R1/067; G01R19/165; G01R31/28; G01R31/305
Foreign References:
| KR20080102232A | 2008-11-24 | |||
| JPH11211778A | 1999-08-06 | |||
| JP2002139541A | 2002-05-17 | |||
| KR20050099977A | 2005-10-17 | |||
| JP2006505114A | 2006-02-09 |
Attorney, Agent or Firm:
KIM, Min-tae (KR)
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